JPH0565057B2 - - Google Patents

Info

Publication number
JPH0565057B2
JPH0565057B2 JP17423186A JP17423186A JPH0565057B2 JP H0565057 B2 JPH0565057 B2 JP H0565057B2 JP 17423186 A JP17423186 A JP 17423186A JP 17423186 A JP17423186 A JP 17423186A JP H0565057 B2 JPH0565057 B2 JP H0565057B2
Authority
JP
Japan
Prior art keywords
storage box
card
wafer cassette
information
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP17423186A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6329923A (ja
Inventor
Akira Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP61174231A priority Critical patent/JPS6329923A/ja
Publication of JPS6329923A publication Critical patent/JPS6329923A/ja
Publication of JPH0565057B2 publication Critical patent/JPH0565057B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Warehouses Or Storage Devices (AREA)
JP61174231A 1986-07-24 1986-07-24 ウエハカセツト収納箱 Granted JPS6329923A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61174231A JPS6329923A (ja) 1986-07-24 1986-07-24 ウエハカセツト収納箱

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61174231A JPS6329923A (ja) 1986-07-24 1986-07-24 ウエハカセツト収納箱

Publications (2)

Publication Number Publication Date
JPS6329923A JPS6329923A (ja) 1988-02-08
JPH0565057B2 true JPH0565057B2 (en]) 1993-09-16

Family

ID=15975013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61174231A Granted JPS6329923A (ja) 1986-07-24 1986-07-24 ウエハカセツト収納箱

Country Status (1)

Country Link
JP (1) JPS6329923A (en])

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5536128A (en) * 1988-10-21 1996-07-16 Hitachi, Ltd. Method and apparatus for carrying a variety of products
JPH03173454A (ja) * 1989-12-02 1991-07-26 Dainichi Shoji Kk 基板収納用容器及びその容器の成形法
JP2774911B2 (ja) * 1992-12-17 1998-07-09 三菱電機株式会社 半導体ウエハ搬送装置
US5605231A (en) * 1994-07-18 1997-02-25 The Green Partnership Inc. Food delivery container
JP3370279B2 (ja) * 1998-07-07 2003-01-27 信越ポリマー株式会社 精密基板収納容器
SG92640A1 (en) * 1999-06-07 2002-11-19 E Pak Resources S Pte Ltd Stud and rider for use on matrix trays
JP5435584B2 (ja) * 2010-07-15 2014-03-05 信越ポリマー株式会社 基板収納容器

Also Published As

Publication number Publication date
JPS6329923A (ja) 1988-02-08

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term